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This paper presents the conception, fabrication and characterization of integrated inductors containing magnetic layers. We require different steps of micro-technologies: preparation of glass and ferrite substrates, RF sputtering, photolithography, etching and finally electroplating techniques for copper and gold films. The geometrical magnitudes are determined by using HFSS simulator software. The measurements performed at low and high frequencies (up to 1 GHz) permit to verify the correlation between experiment and simulation results. The inductance of the manufactured spiral inductor is about 200 nH and it is constant from low frequency up to 0.9 GHz.
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R. Melati, et al., Design of a new electrical model of a ferromagnetic planar inductor for its integration in a micro-converter, Mathematical and Computer 2011
J. Y. C. chang et al., IEEE Electron Device Lett.14, 246, 1993.
J. N. Burghartz et al., IEEE Electron Device Lett.17, 428, 1996.
Gyoung-Bum Kim, Seung-Yong Cha, Eun-Kyung Hyun,Young-Chai Jung, Yoon-Suk Choi, Jae-Sung Rieh, Seong-Rae Lee, and Sung-Woo Hwang, Integrated planar spiral inductors with CoFe and NiFe ferromagnetic layer, Microwave and optical technology letters, vol.50, No.3, 2008.
C. Yang, F. Liu, T. Ren, L. Liu, H. Feng , A. Z. Wang , H. Long , Fully integrated ferrite-based inductors for RF ICs, Sensors and Actuators A 130–131, 365–370, 2006.
Ren Tianling, Yang Chen, Liu Litian , Wang A Z, and Zhang Xiao, Equivalent circuit analysis of an RF Integrated Inductor with Ferrite Thin- Film, Chinese Journal of Semiconductors, vol.27, No.3, 2006.
D. Allassem, PhD Thesis, University of Saint Etienne, France, 2010
G.E. Mechler, R.S. Girgis, Magnetic flux distributions in transformer core joints, IEEE Trans. On Power Delivery, Vol. 15, No. 1, 198, 2000.
Yu Cao et al. Frequency –Independent Equivalent-circuit Model for on –chip spiral inductors, IEEE Journal of solid state circuits, Vol. 38, No.3, 2003.
A. Kriga, D. Allassem, M. Soultan, J.P. Chatelon, A. Siblini, B. Allard, J.J. Rousseau, - Frequency characterization of thin soft magnetic material layers used in spiral inductors, J. of Magnetism and Magnetic Material, Vol. 324, No. 14, 2227-2232, 2012.
C.H. Ivan Lai and M. Fujishima, A New On-Chip Substrate-Coupled Inductor Model Implemented With Scalable Expressions'' IEEE Journal of solid state circuits, Vol. 41, No. 11, 2491-2499, 2006.
Nam-Jin Oh and Sang-Gug Lee, A simple model parameter extraction methodology for on-chip spiral inductor, ETRI Journal, vol. 28, No. 1, 115-118, 2006.
B. Viala, A.S. Royet, and S. Couderc, Investigation of Anomalous Losses in Thick Cu Ferromagnetic Spiral Inductors. IEEE Transactions on Magnetics, Vol. 41, No. 4, 3583-3585, 2005.
A.S. Royet, B. Viala, S. Couderc, and B. Orlando, Investigation of proximity effects in ferromagnetic inductors with different topologies: modeling and solutions. Transactions of Magnetics Society of Japan, Vol.5, No.4, 144-145, 2005.